Technical Parameters
| Status | Test Item | Units | SE303A | TX-KS005C | TX-KS007A |
| Before Curing | Solvent | – | PGMEA | PGMEA | PGMEA Dilutable |
| Viscosity | cps | ＜10 | ＜14 | ||
| Solid Content | % | 50±3 | 20±3 | 100 | |
| Film Forming Process | Coating Method | Refer to spin-coating curve | 2500~4000rpm, 35s (hotplate) 200~500nm |
Inkjet | |
| Pre-bake | 80℃, 2min (hotplate) | 60~80℃, 2min (hotplate) | – | ||
| UV Curing | N2, 365nm UV-LED 600mw/cm² |
N2, 365nm UV-LED 200-300mw/cm², 180s |
N2, 365nm UV-LED 80mw/cm², 6s |
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| After Curing | Appearance | – | Transparent | ||
| Curing Shrinkage Rate | % | <5 | <8 | <9 | |
| Etching Substrate | – | Sapphire | Si , Cd | ||
| Etch Selectivity | – | 0.8 | Si 1.7-2.0，Cd 0.4 | ||
Product Features
● Capable of spin coating
● Withstand vacuum environment
● Tolerate high-temperature baking
